Features
Precision Humidity Generation:
• Precise generation of humidity controlled gas flow
• High accuracy two-pressure / two-temperature principle
• Flow rates up to 100 liters per minute
• Controls %RH, Dew Point, or other humidity parameters
• Simultaneous measurement of up to 3 external temperature probes
• Measurement of pressure and temperature at point of gas use
• PC software for system control and data acquisition
• Optional touch panel for control and status indication
Typical Applications:
• High volume production calibration systems
• Humidity control in semiconductor manufacturing and lithography processes
• Add humidity control to existing temperature chambers
• Precise generation of humidity controlled gas flow
• High accuracy two-pressure / two-temperature principle
• Flow rates up to 100 liters per minute
• Controls %RH, Dew Point, or other humidity parameters
• Simultaneous measurement of up to 3 external temperature probes
• Measurement of pressure and temperature at point of gas use
• PC software for system control and data acquisition
• Optional touch panel for control and status indication
Typical Applications:
• High volume production calibration systems
• Humidity control in semiconductor manufacturing and lithography processes
• Add humidity control to existing temperature chambers
Note : Design and specifications are subject to change without notice.
Note : Please make sure the product and the device which connect with RS-485 are on common ground, avoid damaged product.