THM50X Temperature and Humidity Transmitter｜Absolute Humidity Measurement and 0.1%RH Ultra-Low Humidity Detection for Semiconductor Processes
eyc-tech THM50X Temperature and Humidity Transmitter｜
Absolute Humidity Measurement and 0.1%RH Ultra-Low Humidity Detection for Semiconductor Processes
Semiconductor processes have extremely strict humidity requirements. In stages such as post-clean drying, pre-packaging processes, inert gas purging areas, storage of humidity-sensitive materials, and critical environmental control zones, even slight fluctuations in environmental moisture may affect yield. Relying solely on relative humidity can easily lead to misjudgment due to temperature changes, making it difficult to determine whether the drying process has truly been completed. Therefore, absolute humidity, which directly presents the actual water vapor content in the air, becomes a more reliable basis for judgment. In addition to semiconductors, low-humidity processes in biotechnology and pharmaceuticals, food drying and aging, high-temperature chemical processes, laboratories, and test chambers also require precise, stable, and fast-responding temperature and humidity transmitters.
The THM50X temperature and humidity transmitter directly measures absolute humidity and simultaneously provides temperature, relative humidity, and dew point along with several other humidity-related parameters. This allows engineers not only to see %RH but also to understand “how much water is actually present in the environment.” Combined with 0.1%RH ultra-low humidity resolution, a high-temperature-resistant probe, and multi-parameter display, users can maintain accurate interpretation even under more complex and demanding process conditions, ensuring product quality and process stability.
Multi-Parameter Display(°C / %RH / dp°C / AH%)
Displays temperature, relative humidity, absolute humidity, dew point, and other key engineering parameters simultaneously, allowing engineers to understand environmental conditions without additional calculation. By directly showing absolute humidity, users can more clearly assess drying degree and material moisture-absorption risks. Relative humidity provides supplementary information about temperature-humidity balance, enabling more comprehensive interpretation. With simultaneous display, on-site personnel can make more accurate judgments in less time.
AH% = the actual amount of water vapor in the air, defined based on the saturation value at 25 °C. That is, using the maximum moisture content at 25 °C as 100%, and converting the measured AH into a corresponding percentage.
|
Temperature |
Measured Actual
Absolute Humidity
|
Absolute Humidity
Percentage (AH%)
|
|
100 °C |
4.6 g/m³ |
(4.6 ÷ 23) × 100% = 20% |
|
100 °C |
1.15 g/m³ |
AH% = 5% (good drying) |
Absolute Humidity Measurement
Directly measures the absolute humidity in the air, providing a true indication of small moisture variations in drying stages and low-humidity environments. This enables engineers to clearly determine whether the drying requirement has been met and effectively avoid risks such as water marks, oxidation, and moisture absorption. It is particularly suitable for semiconductors, biotechnology, and other processes that are highly sensitive to water content.
0.1%RH Ultra-Low Humidity Measurement
With 0.1%RH ultra-low humidity measurement capability, the transmitter maintains stable output even near the dryness limit, ensuring that subtle humidity fluctuations are not overlooked. Engineers can identify abnormalities before the drying process is fully completed, preventing product quality issues caused by residual moisture. The ultra-low humidity resolution also enhances the precision of absolute humidity interpretation, allowing operators to perform process adjustments based on more reliable information, ensuring optimal performance in low-humidity environments.
NPN/PNP Output Signal
Equipped with NPN/PNP output signals, the transmitter can convert measurement status into clear switching signals for direct connection to the digital input terminals of PLCs, alarms, or process equipment. Through precise signal indication, equipment can respond immediately, reducing humidity deviation and process risks caused by response delays, enabling faster and more reliable environmental adjustment.
Fast Response and Condensation Recovery
Featuring fast response and rapid recovery after condensation, the transmitter can return to stable operation within a short time even under sudden high-humidity shock. This prevents judgment delays caused by data interruption and ensures continuous and reliable environmental monitoring.
Sensor Type: Capacitive humidity sensor & Pt100 Class A
Measuring Range: Wall-mounted: -40°C ... +80°C / Remote type: -40°C ... +150°C
Output: 4 ... 20 mA / 0 ... 10 V / RS-485 / NPN / PNP
Accuracy: ±0.1°C ±0.002°C × t_actual / ±2%RH
Protection Rating: IP65 (Housing)
