eyc-tech Transmitter Solutions – Boosting Efficiency in the Semiconductor Industry!

Current State and Energy Challenges in the Semiconductor Industry

The global semiconductor industry is facing the dual challenge of rapid development and sustainable operations. As AI, 5G, autonomous driving, and other advanced technologies continue to expand, the demand for high-performance chips is rising, making key processes such as IC design, wafer fabrication, testing, and packaging increasingly critical. Wafer manufacturing requires precise environmental control, including cleanroom HVAC systems, nitrogen generation, air and cooling management, all of which impact factory operating costs and carbon emissions. As a result, leveraging precise monitoring and intelligent management to enhance production efficiency and reduce energy consumption has become a core concern for the semiconductor industry.

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Wafer Fabrication

The wafer manufacturing process involves multiple high-precision, high-cleanliness requirements, including monocrystalline silicon production, wafer processing, cleaning, and wiring, where sensor technology plays a crucial role in monitoring and control.

1. Cleanroom Environmental Monitoring
Wafer fabrication must take place in strictly controlled environments, where temperature, humidity, differential pressure, and airflow directly affect process stability and wafer quality. The THS30X Series Multifunction Temperature & Humidity Transmitter offers high accuracy and versatile installation options to maintain optimal environmental conditions. The PMD330 Differential Pressure Transmitter utilizes a piezoresistive sensing element with a non-vented design, ensuring no airflow between pressure ports, making it ideal for monitoring airflow direction in clean zones to prevent contaminants from entering critical process areas. Meanwhile, the FTS34 Air Velocity Transmitter detects ultra-low airflow speeds as low as 0.2 m/s, ensuring stable laminar flow and preventing particulate contamination.
>>Precise Environmental Monitoring in Cleanrooms; eyc-tech Transmitter

2. Cooling and HVAC System Energy Optimization
Wafer fabrication equipment generates significant heat, necessitating efficient cooling systems to maintain temperature stability. The FTC05 Hot Wire Thermal Flow Switch and THS307 Multifunction Temperature & Humidity Transmitter monitor cooling water circulation efficiency and regulate HVAC cooling output, enabling precise control and preventing energy waste. Additionally, integrating the DPM04 Flow Totalizer provides real-time flow and cumulative data, helping manufacturers optimize air conditioning and cooling systems to reduce overall energy consumption.
>>Precision Monitoring: Optimizing HVAC for Smart Energy Savings

3. Wafer Oxidation and Coating

After wafer cleaning, coatings are applied to prevent recontamination from particles and other impurities. Coating processes include Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD), both of which often utilize glove box systems. These systems consist of vacuum chambers, air purification equipment, moisture and oxygen concentration control devices, and real-time monitoring displays to maintain strict environmental conditions, protecting sensitive materials and improving product yield.

Maintaining ultra-low moisture and oxygen levels inside glove boxes is a key technical requirement for precision processing. The standard concentration requirements are often below 1 PPM, 3 PPM, or 5 PPM, which are crucial for ensuring product yield. The THS88MAX Industrial Dew Point Transmitter Kit is recommended for glove box environments to monitor internal moisture levels. This sensor, with a measurement range of 0–1000 PPM, allows for customizable settings, ensuring a dry and oxygen-free environment essential for high-quality, stable semiconductor processing.

Wafer Storage and Packaging

1. Nitrogen Generation System and Air Supply Monitoring
Inert air such as nitrogen (N₂) play a vital role in semiconductor manufacturing processes, including etching, coating, and packaging, preventing metal oxidation. The FTM06D Thermal Mass Flow Transmitter provides real-time nitrogen flow monitoring to ensure a stable air supply. The P064 Digital Differential Pressure Transmitter monitors pipeline pressure to prevent production disruptions, while the THS88MAX Industrial Dew Point Transmitter Kit offers plug-and-play functionality with real-time measurement display, ensuring nitrogen remains dry and free of moisture-related contamination risks.

2. Chemical and Exhaust Air Monitoring

Wafer fabrication involves various high-purity chemicals, such as etchants and photoresists, whose exhaust air must be carefully treated before discharge. The FTM94/95 Industrial High Accuracy Thermal Mass Flow Transmitter is designed for demanding environments, offering exceptional accuracy, dust resistance, and durability under high temperatures and pressures. This sensor can monitor volatile organic compounds (VOCs) and other hazardous air, ensuring exhaust treatment systems operate effectively and comply with environmental regulations.

>>eyc-tech Apply Transmitter in Industrial Exhaust Air Treatment and Manage Carbon Emission

Conclusion

The semiconductor industry demands increasingly stringent environmental control and energy management, making sensor technology a critical tool for improving process quality and stability. By precisely monitoring cleanroom environments, nitrogen generation systems, cooling equipment, and exhaust treatment, manufacturers can enhance production efficiency, reduce operating costs, and move toward more sustainable manufacturing practices. As smart factory and AIoT technologies continue to evolve, sensors will play an even greater role in semiconductor manufacturing, driving higher efficiency and greener production solutions.

THS30X Series Multifunction Temp. & Humid. Transmitter

Features : Suitable for light industry. High accuracy. Various installation method.
Sensor type : Capacitive Humidity Sensor & Pt 100 A class
Measuring range : -40 ... +80°C / 0 ... 100%RH
Output : 4 ... 20 mA / 0 ... 10 V / RS-485
Accuracy : ±0.2°C / ±1.8%RH
IP rating : IP65

PMD330 Differential Pressure Transmitter (Indoor)

Features : Suitable for hospital and clean room; Wide measuring range
Measuring element : Piezoresistive diff. pressure sensor, no flow-through
Measuring range：±50 ... ±10000 pa
Output : 4 ... 20 mA / 0 ... 10 V / RS-485
Accuracy : ±2.0% F.S.
IP rating : IP65

P064 Digital Differential Pressure Transmitter

Features：Suitable for industrial application. Can measure liquid differential pressure.
Sensor type : Monocrystalline silicon differential pressure sensor
Measuring range：0.1 ... 25 bar
Output：4 ... 20 mA+HART
Accuracy：0.075 ... 0.2%
IP rating：IP65

FTC05 Hot Wire Thermal Flow Switch

Features : Suitable for oil, water and liquid flow monitoring. Also work as level detector.
Sensor type : Resistance Temperature Detector (RTD)
Measuring range : 1 ... 200 cm/s(Water) / 3 ... 300 cm/s(Oil) / 6 ... 20 m/s(Gas)
Output : PNP / NPN / Relay
IP rating : IP65 (Option IP67)

THS88MAX Industrial Dew Point Transmitter

Features : Suitable for compressed dry air systems and industrial drying systems.
Sensor type : Capacitive humidity sensor & Pt100
Dew point scaling range : -80 ... +20 dp°C
Output : 4 ... 20 mA / 0 ... 10 V / RS-485
Accuracy : ±1 ... ±2 dp°C
IP rating : IP65 (Probe : IP20)

DPM04 Flow Totalizer

Features : 2" LCD display for air/liquid flow transmitters with RS-485 and relay output, for both instantaneous and cumulative flow monitoring
Display readout : Instantaneous flow : 5-digit / Cumulative flow : 8-digit
Input : Current / Voltage / Frequency / Pulse
Output : Current / Voltage / Relay / RS-485
Accuracy : ±0.1% F.S. ±1 digit
IP rating : IP65 (Front panel)

FTS34/35 Air Velocity Transmitter

Features : Suitable for light industry. High accuracy and high stability.
Sensor type : Thermal mass flow sensor
Measuring range : 0 ... 40 m/s
Output : 4 ... 20 mA / DC 0 ... 10 V
Accuracy : ±2% F.S.
IP rating : IP54

FTM06D Thermal Mass Flow Transmitter

Features : Suitable for compressed dry air system.
Sensor type: Thermal mass flow sensor meter
Measuring range: 0 ... 120 m/s
Output: 4 ... 20 mA / 0 ... 10 V / RS-485 / Frequency / Pulse
Accuracy: ±1.5% F.S.
IP rating: IP65

FTM94/95 Industrial High Accuracy Thermal Air Velocity Transmitter

Features : Designed for industrial application. Air flow measurement up to 120 m/s. Resistant to high temperature, high pressure, dust, and corrosion.
Sensor type : Pt20 / Pt300(Air velocity) / Pt1000(Temp.)
Measuring range : 0 ... 120 Nm/s
Output : 4 ... 20 mA / 0 ... 10 V / RS-485 / Impulse
Accuracy : ±1.5% F.S.
IP rating : IP67(Probe) / IP65(Housing)

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